http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165524-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73ebc284a55d5daf0e209d6186c9e65c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 2005-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ba95d71ad8ea09198397e9ee88c09e7 |
| publicationDate | 2007-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007165524-A |
| titleOfInvention | Semiconductor device manufacturing method, electronic device manufacturing method, semiconductor device, and electronic device |
| abstract | A technique for forming a low-resistance impurity-doped silicon film by heat treatment at a relatively low temperature is provided. A solution containing a high-order silane composition, a catalyst and a dopant element, for example, a liquid obtained by irradiating cyclopentasilane with ultraviolet light and then diluting it with toluene (solvent) (high-order silane composition) The coating solution A, in which a dopant element-containing compound (for example, yellow phosphorus) and a catalyst (nickel chloride) are mixed, is applied onto the substrate to form the coating film 13, and then, for example, 300 ° C. to 600 ° C. To form an impurity-doped silicon film 13a. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104919094-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104919094-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007284639-A |
| priorityDate | 2005-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 80.