http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007165178-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7ae400d6ceba4be22f4b8e0c76f925ca |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 |
| filingDate | 2005-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddc35d201aa13641b4d4c6b331dea327 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee714447c129887d694f75c5c72e3fa1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89c60a2837617dc5fbe5cca67fe952a4 |
| publicationDate | 2007-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007165178-A |
| titleOfInvention | Method for producing cathode for field emission lamp |
| abstract | A novel method for manufacturing a wire cathode for a field emission lamp is provided. The manufacturing method includes a vacuum chamber 12 and a metal cylindrical body 14 disposed in the vacuum chamber 12, introduces a plasma generating gas into the cylindrical body 14, and generates a plasma generating voltage. A first step of placing a wire 16 made of carbon on the cylindrical body 14 using a plasma generator that applies plasma to generate plasma in the internal space of the cylindrical body 14, and sputtering plasma in the cylindrical body 14 A second step of sputtering the cylindrical body to form a metal film on the surface of the wire 16, a third step of energizing and heating the wire 16 to make the metal film into a large number of metal fine particles, and a cylindrical body And a fourth step of generating an acicular carbon film by generating an etching plasma within 14 and etching the wire surface using metal fine particles as a mask. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010198970-A |
| priorityDate | 2005-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.