| abstract |
Provided is a pellicle in which when a pellicle is peeled off from a photomask, a part of the mask adhesive of the pellicle is peeled off and transferred to the surface of the photomask to leave less adhesive residue. A polyethylene terephthalate film having a thickness of 125 μm that has not been surface-treated is adhered to a mask adhesive layer 9 of a pellicle, and then the polyethylene terephthalate film is peeled in a 180 ° direction with respect to the adhesive surface at a temperature of 23 ° C. A pellicle 1 having a peeling strength of 0.004 N / mm to 0.10 N / mm. Preferably, an acrylic emulsion adhesive is used as the mask adhesive 7 that adheres to the photomask. [Selection] Figure 1 |