http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007155851-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e7962109cd4763907b82b66760cd0ae8 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F297-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83c1131daeeaec5f926f86c6f2d5b318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4dc9c09934b1a48ab29e8b4a96e70164 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_474e32a96a50fc7a0037287883e29416 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3c197278234a2e6804ab95ef42dd4ef |
| publicationDate | 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007155851-A |
| titleOfInvention | Resist composition and method for producing the same |
| abstract | A solubility in a solvent, coating of the board, sensitivity, particularly excellent resist composition resolution, and a method of manufacturing the same. SOLUTION: Formula (I) (In the formula, R 1 represents a hydrogen atom or a lower alkyl group, and R 2 represents an organic group.) One or more types derived from an (α-lower alkyl) acrylate ester represented by A resist composition comprising a star polymer having a polymer chain having a repeating unit as described above as an arm part, and an arm polymer constituting the arm part of the star polymer, and a method for producing the resist composition. [Selection figure] None |
| priorityDate | 2005-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 288.