| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6bfdf49224a405be1f7b653c56ebad94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b9822bceff022feda91b10019125e70f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C211-65
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C251-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 |
| filingDate |
2006-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a20a08ffa566b0e0472e3cbe9ed4f9bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d2dcf0909351ced21355ade0fa47682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2eeabf318be63fb401b429373c6faf6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_921d873925d187872b1c414192c86680
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_643638fd778c4f15d8e319f91401f218
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bc4a562dd829b87f58d07f9d3b53f7b |
| publicationDate |
2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007153872-A |
| titleOfInvention |
Titanium complexes, methods for producing them, titanium-containing thin films, and methods for forming them |
| abstract |
A method for producing a novel titanium complex and a method for forming a titanium-containing thin film using the same are provided. A titanium complex represented by the general formula (1) is produced by reacting diimine with metallic lithium and then reacting with a tetrakisamide complex, and a titanium-containing thin film is formed using the titanium complex as a raw material. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9371452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009157326-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010030986-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013035672-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8779174-B2 |
| priorityDate |
2005-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |