http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007148000-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-02 |
| filingDate | 2005-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3459cb5cc8b4d592db3bdd04ae5cf7d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_368f3adf309874820f1cd2166e6641b4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0404f734ae876eb23bfedabca2abc0c7 |
| publicationDate | 2007-06-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007148000-A |
| titleOfInvention | Photoresist composition for spray coating and laminate |
| abstract | Even when a step portion is formed on a surface to be coated of a substrate, a photoresist film having a good film thickness uniformity can be formed by a spray coating method. A photoresist film is formed by spray coating using a photoresist composition containing a modified siloxane surfactant on a substrate on which a stepped portion 1 having a step H of 10 to 1000 μm is provided on the surface to be coated. 2 is formed. The upper surface 1a and the side surface 1b of the step portion 1 are continuously covered with a photoresist film 2, the film thickness of the photoresist film 2 on the step portion upper surface 1a is 1 to 40 μm, and the upper surface 1a and the side surface 1b of the step portion A laminated body having a thickness of 75% or more of the thickness of the upper surface 1a adjacent to the boundary is obtained. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011039128-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015064605-A |
| priorityDate | 2005-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 498.