http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007133431-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_74973199515dbabd2310245aab03e282 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2007-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5673ffa4cd023e85c7e39c65f753251e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9260997730f384982e67e885af9fcb72 |
| publicationDate | 2007-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007133431-A |
| titleOfInvention | Optical system and method of using optical apparatus using the optical system |
| abstract | Use of ultraviolet light such as a lamp or laser oscillator provided with an optical system made of vacuum ultraviolet light having a photon energy higher than the absorption edge wavelength of an optical base material or fluoride placed in an environment irradiated with plasma In the apparatus, the optical deterioration due to the irradiation with the vacuum ultraviolet light is suppressed, thereby providing an apparatus with high light output intensity over time and long life. SiO 2 or Al 2 O 3 , MgO, TiO 2 having a thickness of several to several tens of nm that suppresses fluorine atom detachment and oxidation of the optical system surface layer due to light irradiation at least on the light incident side of the optical system. By forming a metal oxide protective film made of any one of ZrO 2 , it is possible to suppress a decrease in transmittance of the optical system during operation. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103817445-A |
| priorityDate | 2007-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.