http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007126353-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01F11-22 |
| filingDate | 2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8298143d3d05f2e0a9051aa91829e40e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7b8eef936fb2af1738385646c2a6bf5 |
| publicationDate | 2007-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007126353-A |
| titleOfInvention | Fluorite, optical system and exposure apparatus using the same |
| abstract | The present invention relates to a fluorite whose transmittance characteristics are unlikely to deteriorate even when repeatedly irradiated with high-power light at a short wavelength for a long period of time, an optical component comprising the fluorite, and an exposure apparatus for photolithography using the optical component I will provide a. Fluorite has an internal transmittance of 70% or more for light having a wavelength of 135 nm. Fluorite is a fluorite containing strontium, and the content of strontium is 1 ppm or more and 600 ppm or less. An optical system for excimer laser has a lens made of fluorite or fluorite containing strontium. An exposure apparatus for photolithography includes an optical system having a lens made of fluorite, and a stage that holds a substrate to be exposed. An exposure apparatus for photolithography includes an optical system having a lens made of fluorite containing strontium and a stage that holds a substrate to be exposed. [Selection] Figure 1 |
| priorityDate | 2006-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.