| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7acd9416af412b5972feb55a5e652ea2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-006 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-50 |
| filingDate |
2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a80b34e3591d2711bd2b4c281dd6632
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75f2f4bd8b1d2b552260b786e40e1864 |
| publicationDate |
2007-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007123449-A |
| titleOfInvention |
Optical component manufacturing method and light emitting device |
| abstract |
PROBLEM TO BE SOLVED: To provide an optical component manufacturing method capable of roughening the surface of an optical component easily and without generating residual stress and cracks, and a light emitting device manufactured by the manufacturing method. A surface on which light is incident or emitted in a workpiece 1 constituting an optical component is roughened by reactive ion etching using a halogen plasma 3 containing an alkali metal. Since the formation of the particulate mask with the alkali metal and the etching with the halogen plasma 3 are performed at the same time, a process for forming the mask is not required separately, which is easy. Further, unlike roughening by polishing, residual stress and cracks do not occur. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101718271-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150104637-A |
| priorityDate |
2005-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |