| abstract |
Disclosed is a photoresist stripping solution that has excellent anticorrosion properties for metal wiring and photoresist stripping, and can collect and recycle used stripping solution at a high rate and can be recycled (recycled). SOLUTION: (a) 2-20% by mass of a polyhydric alcohol (for example, propylene glycol), (b) 5-20% by mass of alkanolamine (for example, monoisopropanolamine), (c) 5 of water. A photoresist stripping solution containing ˜60% by mass and (d) 20 to 90% by mass of glycol ether (for example, diethylene glycol monobutyl ether) and further (e) an anticorrosive agent as desired. [Selection figure] None |