http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007103907-A

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filingDate 2006-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4b26e3b3c0ca532c7f5477ff9cca5df6
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publicationDate 2007-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007103907-A
titleOfInvention Optical element and manufacturing method thereof
abstract The present invention provides a high-performance optical element in which the electrode is not disconnected and leakage current is reduced, and an optical element manufacturing method capable of manufacturing the optical element without causing a decrease in yield. An optical element includes a surface-emitting semiconductor laser and a photodetecting element formed on the semiconductor substrate on the semiconductor substrate. The optical element 10 includes at least one of a first insulating layer 50 formed so as to cover a part of a side surface and an upper surface of the first columnar portion 40 including at least a part of the surface emitting semiconductor laser 20, and the light detecting element 30. A second insulating layer 70 formed so as to cover a part of the side surface and the upper surface of the second columnar portion 60 including the portion. [Selection] Figure 2
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Total number of triples: 26.