http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007102156-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2cc87d476fde0ce82ac3b7245e61b785 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2006-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e42defcd083ccc2e135d1a2fcc74aa1 |
| publicationDate | 2007-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007102156-A |
| titleOfInvention | Manufacturing method of three-dimensional structure, three-dimensional structure, optical element, and stencil mask. |
| abstract | An object of the present invention is to provide a method for producing a three-dimensional structure capable of producing a precise three-dimensional structure in a short production time, a three-dimensional structure obtained by the production method, an optical element, and a stencil mask. It is. An irradiation step of irradiating a negative resist layer with an electron beam and a development step of developing the resist layer after the electron beam irradiation to remove a non-irradiated portion, the irradiation step comprising: A first irradiation step of irradiating an electron beam with an acceleration voltage reaching the substrate to a single resist layer, and a second irradiation step of irradiating an electron beam with an acceleration voltage not reaching the substrate; The dose amount of the electron beam is adjusted so that the structure portion formed after development by the first irradiation step and the structure portion formed after development by the second irradiation step are joined, and the first irradiation step And a second irradiation step, a method for manufacturing a three-dimensional structure, an optical element, and a stencil mask. [Selection] Figure 2 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009237154-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012009497-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009140974-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009155167-A |
| priorityDate | 2005-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.