http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007101607-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1335 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1339 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1337 |
| filingDate | 2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cc14b972857d44fa40fb18191add04e |
| publicationDate | 2007-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007101607-A |
| titleOfInvention | Display device member, method of manufacturing the same, and display device |
| abstract | Provided are a high-definition display device member, a manufacturing method thereof, and the like, in which an image size change due to fatigue of a developer is extremely small without using a photomask, and there is no unevenness. An exposure head having at least a light irradiation means and a light modulation means and at least one of the photosensitive layer and a light irradiation means to the photosensitive layer while moving the photosensitive layer positioned on the surface of the substrate. An exposure step of exposing the photosensitive layer by irradiating the light emitted from the exposure head while modulating the light according to the pattern information by the light modulation means, and a development step of developing the exposed photosensitive layer, The exposure process monitors the image size of the pattern formed after the development process, feeds back pattern information to the exposure process, and satisfies a pattern size of 95 to 105% of the pattern size when developed with an unused new developer. In this way, the display device member is manufactured by adjusting the exposure. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9671700-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108415110-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102346337-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017083546-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9684164-B2 |
| priorityDate | 2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 627.