| abstract |
The present invention provides a decontamination method and a decontamination apparatus for equipment capable of reducing the amount of waste water. Since the inside of the device is evacuated after the dry gas supply step (step S101) (step S103), whether heavy water in the liquid state remains in the device based on the pressure in the evacuated device. It is possible to easily determine whether or not, and in step S105, it is possible to determine that the water vapor is to be supplied into the apparatus after reliably grasping that no heavy water remains. Then, in the state where liquid heavy water does not remain in the device, the isotope exchange reaction is performed by introducing water vapor into the device (step S107), so the time required for the isotope exchange is reduced. [Selection] Figure 2 |