http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007088284-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7cf5ed2bb9f51004891e082dfb48740f |
| publicationDate | 2007-04-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007088284-A |
| titleOfInvention | Aqueous polishing liquid and chemical mechanical polishing method |
| abstract | PROBLEM TO BE SOLVED: To provide an aqueous polishing liquid capable of producing an LSI having a rapid CMP speed, less scratching and dishing and improved flatness, and a chemical mechanical polishing method using the aqueous polishing liquid. thing. A water-based polishing comprising a 5-membered monocyclic compound having three or more nitrogen atoms, a compound obtained by condensing a heterocyclic ring to the compound, and a compound B containing a benzene ring and a hydroxy group And a chemical mechanical polishing method using the aqueous polishing liquid. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012176493-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-6301571-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010192556-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009094504-A |
| priorityDate | 2005-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 356.