| abstract |
A novel nitride coating method, such as a titanium nitride coating, is provided. Nitride formation such as metal titanium powder is performed by embedding a substrate to be coated in powder of a material having nitride forming ability such as metal titanium powder, and exposing to an alternating electric field by irradiation with microwaves. A powder of a substance having a function can be nitrided by reacting with a nitrogen component in the atmosphere in a solid state, and at the same time, a nitride such as titanium nitride formed on the substrate surface can be coated. The atmosphere may be enriched with nitrogen as long as it does not cause a self-combustion reaction such as titanium. [Selection] Figure 3 |