http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007081316-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2005-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5117df5323734ea44e6f5d31d94aca51 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12a8dc53697a9aa533b75f401ecb5452 |
| publicationDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007081316-A |
| titleOfInvention | Metal polishing liquid and chemical mechanical polishing method |
| abstract | PROBLEM TO BE SOLVED: To provide a metal polishing liquid having a rapid CMP speed, less dishing and improving flatness, and capable of producing an LSI, and a chemical mechanical polishing method using the metal polishing liquid. thing. A metal polishing liquid comprising at least one compound represented by the following formula (I) and at least one other chelating agent represented by the following formula (I): A metal-polishing liquid containing at least one kind of compound, at least one other chelating agent, and an oxidizing agent, wherein the concentration of the oxidizing agent is 1% by weight or less. A metal polishing liquid and the metal polishing liquid are brought into contact with the surface to be polished, and the surface to be polished and the polishing surface are moved relative to each other to polish at least a part of the metal by polishing the substrate on which the metal wiring is formed. A chemical mechanical polishing method comprising a removing step. In the following formula (I), each Z independently represents an atomic group that forms a 5-membered or 6-membered ring. [Chemical 1] [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101395866-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106661432-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009094504-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016038995-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016056254-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010192556-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010153626-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015043371-A |
| priorityDate | 2005-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 332.