http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007079474-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0295 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
filingDate | 2005-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58752add075e6c4533df235bf6d3a574 |
publicationDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007079474-A |
titleOfInvention | Pattern forming material, pattern forming apparatus and pattern forming method |
abstract | PROBLEM TO BE SOLVED: To provide a pattern forming material capable of obtaining a high-sensitivity, excellent developability and high-resolution pattern, and a pattern forming apparatus and a pattern forming method provided with the pattern forming material. A photosensitive layer containing a binder, a polymerizable compound, and a photopolymerization initiator is provided on a support, the sensitivity of the photosensitive layer is 20 mJ / cm 2 or less, and the photosensitive layer has a line width of 10 A line formed by exposure at L / S = 1/1 of a pattern obtained by exposure and development at 40 μm at line / space (L / S) = 1/1 and L / S = 1/100. A pattern forming material, wherein a difference in line width between a pattern and a line pattern formed by exposure at L / S = 1/100 is 5 μm or less. An embodiment in which the binder has an I / O value of 0.5 to 0.8, an embodiment in which the polymerizable compound has an I / O value of 0.5 to 1.5, and the like are preferable. The present invention also provides a pattern forming apparatus and a pattern forming method using the pattern forming material. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2017018053-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019168624-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008275822-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017018053-A1 |
priorityDate | 2005-09-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 956.