http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007075667-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9df90d7822cc480ce12c480f4089e229 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-12 |
| filingDate | 2005-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0623caef09358f8fa6cbfe0f4c1fb161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88c68e59f49100ff0bd67c0cae350a44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50081e61f5bc8b93bb6be2652f6d06e3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1233c60d0358908e4bb0c14915d9475f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50465a5a6104d89959f66d4aa98ce940 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4417e3b49178178eeb3cfc86cfd0a6cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83dc76bee8ae46e15054fc8e76e9bdb7 |
| publicationDate | 2007-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007075667-A |
| titleOfInvention | Method and apparatus for manufacturing functionally graded thin film |
| abstract | PROBLEM TO BE SOLVED: To form a functionally gradient structure thin film by making it possible to precisely control the concentration change in the depth (thickness) direction of the thin film and to make this change uniform while suppressing variations in the planar position of the thin film. [MEANS FOR SOLVING PROBLEMS] Two or more components of inorganic or organic functional material and polymer are mixed from components in a solution or dispersion placed under atmospheric pressure, and mixed in a high vacuum container (3) through a spray nozzle (1). Directly sprayed onto the substrate (15) and deposited on the substrate (15), and a high-functional functional thin film in which the concentration of the component is arbitrarily changed in the depth direction is easily formed with good control. [Selection] Figure 2 |
| priorityDate | 2005-09-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 82.