http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007072102-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435d9c9b194a593797b0d757710778ec |
| publicationDate | 2007-03-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007072102-A |
| titleOfInvention | Positive photosensitive composition and pattern forming method using the same |
| abstract | Provided is a positive photosensitive composition having excellent density dependency even in the formation of a fine pattern of 100 nm or less, and a pattern forming method using the same. SOLUTION: A positive photosensitive material containing a resin having a group that generates an acid upon irradiation with actinic rays or radiation and (B) a group that decomposes by the action of the acid and increases the solubility in an alkali developer. The resin of the component (B) has a repeating unit (Ba) having a diamantane structure and a group that decomposes by the action of an acid and increases the solubility in an alkaline developer, It is a resin having a repeating unit (Bb) having a non-polycyclic hydrocarbon structure in a group that is decomposed by the action of the above and is eliminated by the action of an acid of a group that increases the solubility in an alkali developer. A positive photosensitive composition and a pattern forming method using the same. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8252503-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009119894-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7691556-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012123-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008297381-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012181270-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012208431-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2255250-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008239889-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2255250-A1 |
| priorityDate | 2005-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 163.