| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435d9c9b194a593797b0d757710778ec |
| publicationDate |
2007-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007065353-A |
| titleOfInvention |
Photosensitive composition and pattern forming method using the photosensitive composition |
| abstract |
Kind Code: A1 A photosensitive composition used in a semiconductor manufacturing process such as an IC, a circuit board such as a liquid crystal and a thermal head, and other photofabrication processes, and a pattern forming method using the photosensitive composition. The present invention provides a photosensitive composition having improved line edge roughness and pattern profile and improved sensitivity and dissolution contrast in EUV light exposure, and a pattern forming method using the photosensitive composition. A photosensitive composition containing a compound having a specific structure and a pattern forming method using the photosensitive composition. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007212796-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021153124-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008250274-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010134640-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010276924-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012041320-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009019028-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008281975-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007212797-A |
| priorityDate |
2005-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |