| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8610d80271361bf183d22f43b7c5ae26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05568
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48091 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 |
| filingDate |
2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be67001f9e9e4bad81cc7b8e404374d8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6be60695073a6f8fbb48cdc7af643791
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41a3e18fcd8b2c4ba75a55c926f5b99d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9eab66d2f1dd21eb9e5128505dd45129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf0dc2bef97d2c5189e13ad46d4d71a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_455a0a8cca9b0b32f3dc35b952d4f331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e61ddd332a11e3eb3e1b13a90eb1c932
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22e968ee8d08b515956a7886e2d06d23 |
| publicationDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007059470-A |
| titleOfInvention |
Semiconductor device and manufacturing method thereof |
| abstract |
Provided is a semiconductor device in which a functional element having a vibrator or the like is incorporated in a functional surface, the functional element can be hermetically sealed, and can be reduced in size and thickness, and a manufacturing method thereof. A functional element 13 provided on a surface of a device substrate 11 and having a vibrator or a movable portion; a first land 12 arranged on the outer peripheral portion of the functional element 13 and provided on the surface of the device substrate 11; The bump 14 and the second land 22 are electrically connected to the circuit board 20 having the second land 22 formed so that the micro device 10 having the bump 14 provided on the first land 12 corresponds to the bump 14. Are mounted from the formation surface side of the bump 14 so as to be connected to each other, and the connection portion between the bump 14 and the second land 22 is fixed over the entire circumference of the functional element 13, and the device substrate 11 and the circuit substrate 20 are connected to each other. A sealing resin layer 27 is formed so as to seal the gap, and the hollow portion 15 is configured between the functional element 13 and the circuit board 20. [Selection] Figure 1 |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013046069-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101477392-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010258586-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019511832-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010109880-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013131669-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008278149-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7033069-B2 |
| priorityDate |
2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |