abstract |
PROBLEM TO BE SOLVED: To provide a novel photoresist and a dye compound used therefor. The present invention relates to a novel photoresist composition comprising a resinous binder, a photoactive component, in particular an acid generator, and a dye material containing one or more chromophores. The photoresist composition of the present invention can reduce unwanted reflections of radiation. Preferred dye compounds of the present invention are polymeric substances having one or more chromophores composed of anthracene or other polycyclic moieties having an absorption band in the far ultraviolet region. |