http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007057237-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86df70be6baafcc380c5c26c307c005b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-06 |
| filingDate | 2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5802372b1dc3749b58bb9ff90c4ad443 |
| publicationDate | 2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007057237-A |
| titleOfInvention | Probe card and electronic device inspection method |
| abstract | PROBLEM TO BE SOLVED: To provide a probe card and an inspection method capable of reliably conducting with an electrode of a specimen by scraping off an insulating film of the specimen electrode by vibration of a vibrator. A substrate, a plurality of conductive wires formed on the substrate, a contact portion formed on a portion of the conductive wire on the substrate and contacting an electrode of a specimen, and orthogonal to a plate thickness direction of the substrate. And a vibrator that vibrates the conducting wire in a direction to move. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102621479-A |
| priorityDate | 2005-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.