| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b19eaa8e535da4e4bceed99917a68153 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4d4cd6fee771a73b735ddd6f42e79e1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04b9fe40bb862462723b7348f6fc644a |
| publicationDate |
2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007053214-A |
| titleOfInvention |
Polishing composition |
| abstract |
PROBLEM TO BE SOLVED: To suppress dishing or erosion in polishing a surface where a metal is exposed. A polishing composition comprises (A) an anionic surfactant containing (x) a polyoxyethylene structure and (y) an unsaturated hydrocarbon structure in the molecule. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2018163617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I794204-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007184395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11203731-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7140745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8956430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012503329-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018163617-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8048808-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2464852-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2464852-B |
| priorityDate |
2005-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |