http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007052311-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d82ddd0c14725cf3a0d448d3e83a0a9 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09F9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 |
| filingDate | 2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8764f0a650b24826328da0dd8e70ca32 |
| publicationDate | 2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007052311-A |
| titleOfInvention | Electro-optical device and electronic apparatus |
| abstract | PROBLEM TO BE SOLVED: To provide an electro-optical device and an electronic apparatus capable of preventing point defects and line defects due to disconnection of an upper electrode material by preventing deformation of an element part and a storage capacitor part by a heat treatment process. thing. In a method for manufacturing an electro-optical device, a tantalum film 6 is patterned to form a first tantalum pattern 6a having a lower electrode 61 for a nonlinear element, a data line 2, a lower electrode 62 for a storage capacitor, and a common electrode. The second tantalum pattern 6b having 63 is formed. Next, anodization is performed using the data line 2 as a power supply line, and a thick second tantalum oxide film 7b constituting the storage capacitor oxide film 72 is formed only on the surface side of the second tantalum pattern 6b. . Next, a thin first tantalum oxide film for forming a non-linear element oxide film is formed only on the surface side of the first tantalum pattern 6a by vapor phase oxidation. [Selection] Figure 6 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011161760-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8846162-B2 |
| priorityDate | 2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.