| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_242cc8d15c771395b920cc7de452da6a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-656
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-786
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-9692
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3826
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-3217
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B2235-5445
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T279-23 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-505
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 |
| filingDate |
2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34bf483806021d08b8b4c391ae3b8ff9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa76449ccaadd5d7d17b2749c864e018 |
| publicationDate |
2007-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2007051045-A |
| titleOfInvention |
Yttria sintered body, electrostatic chuck, and method for producing yttria sintered body |
| abstract |
An yttria sintered body having excellent corrosion resistance and mechanical strength and having an adjusted volume resistivity is provided. A yttria sintered body contains 5 to 40% by volume of silicon carbide and has a volume resistivity in a range of 1 × 10 1 to 1 × 10 17 Ω · cm at room temperature. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I394735-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9944561-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2015137270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220136340-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012232897-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009215154-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220136341-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012099856-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101929053-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010042967-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008260644-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101982446-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009221028-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101155799-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180086395-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010123862-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009133638-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008255001-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010034256-A |
| priorityDate |
2005-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |