http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007045682-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d79a3714d75520adeea100b7ed428a77 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-203 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B15-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_625743f69338f3dfa254326d2038f5be http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20550dbfd08aa69a1289ccd68e73bbc2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee2caaa6cf005675ee354c7a2b91b059 |
| publicationDate | 2007-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007045682-A |
| titleOfInvention | Silicon single crystal growth method and silicon wafer |
| abstract | PROBLEM TO BE SOLVED: To provide a silicon single crystal growth method capable of growing a silicon single crystal including a dislocation cluster generation region and having a low LPD density of 0.09 μm or more. SOLUTION: A method for growing a silicon single crystal by the Czochralski method, wherein an atmosphere gas for growing a single crystal contains a gas containing a hydrogen-containing substance, and at least part of a radial cross section of the silicon single crystal. A method for growing a silicon single crystal in which a silicon single crystal is grown at a pulling rate at which dislocation cluster generation regions are formed and at a lower pulling rate than a pulling rate at which infrared scatterer defect generation regions are formed. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014092065-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014118865-A |
| priorityDate | 2005-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.