http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007041200-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
filingDate | 2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_435d9c9b194a593797b0d757710778ec http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79a4c297fe26465f427b7bf18a643a56 |
publicationDate | 2007-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007041200-A |
titleOfInvention | Positive photosensitive composition and pattern forming method using the same |
abstract | A positive photosensitive composition used in semiconductor manufacturing processes such as IC, circuit boards such as liquid crystal and thermal head, and other photofabrication processes, and a pattern forming method using the same. Provided are a positive photosensitive composition excellent in development defects and improved in line edge roughness and pattern collapse even in the formation of a fine pattern of 100 nm or less, and a pattern forming method using the same. SOLUTION: (A) a compound that generates an acid upon irradiation with actinic rays or radiation, (B) a positive resin containing a resin that decomposes by the action of an acid and increases the solubility in an alkaline developer, and (F) a solvent. Type photosensitive composition, wherein the resin of component (B) has a repeating unit (Ba) having a diamantane structure, has a weight average molecular weight of 3000 to 30000, and a dispersity of 1.1 to 3.0 And a pattern forming method using the same. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007231002-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007088749-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009197207-A |
priorityDate | 2005-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 152.