http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007035899-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67103 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05B3-148 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2005-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98a5655f9d3dad1894493a2b3dc75374 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84f87b9f193835411898eb9ca380d37e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f7979410d33e310f0f9b58eca4d4bbb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa762828dd9af380ec313d0e40095cb2 |
| publicationDate | 2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007035899-A |
| titleOfInvention | Wafer holder for wafer prober and wafer prober mounted therewith |
| abstract | PROBLEM TO BE SOLVED: To provide a wafer holder, a heater unit thereof, and a wafer prober on which the wafer holder is mounted, which can improve the heat uniformity of the wafer without misalignment of the wafer placed on the wafer placement surface at the chuck top. A wafer holder (1) having a chuck top (2) for mounting and fixing a wafer and a support (4) for supporting the chuck top (2), wherein the water absorption rate of the chuck top (2) is 0.01% or more. Or preferably 0.1% or more. The material of the chuck top 2 is preferably a composite of metal and ceramics, in particular, a composite of aluminum and silicon carbide or a composite of silicon and silicon carbide. [Selection] Figure 1 |
| priorityDate | 2005-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.