http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007035714-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2005-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1de9d0c900185bec98c3884ac5cdc3b |
| publicationDate | 2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007035714-A |
| titleOfInvention | Substrate surface cleaning method |
| abstract | PROBLEM TO BE SOLVED: To improve the cleaning ability in a method for cleaning a substrate surface using a supercritical fluid. SOLUTION: One or more subcomponents having a melting point higher than the critical temperature with respect to the supercritical fluid are contained, and the subcomponent is phase-separated from the supercritical fluid to form solid fine particles which are dispersed in the supercritical fluid. Contamination is removed using an impact force that the solid fine particles collide with the surface of the object to be cleaned. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-115213159-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013258272-A |
| priorityDate | 2005-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.