http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007031838-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3497 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate | 2006-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f5a8d7b9bc20b2ebad57e75b119f318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e75e3c22a875c0e52581e6898e836eea http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_042671c6dd9dcf35ba27d07bf9b7fbac |
| publicationDate | 2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007031838-A |
| titleOfInvention | Controllable target cooling |
| abstract | A sputter target assembly (18) particularly useful in a large area panel plasma sputter reactor having a target assembly sealed in both a main processing chamber (14) and a vacuum chamber (32) containing a moving magnetron (30). , 20). A target assembly to which target tiles are bonded includes a unitary plate (62) with parallel cooling holes (64) drilled in parallel to a major surface. The ends of the holes are sealed (74) and the vertically extending slots (66, 68, 70, 72) are arranged in two staggered groups at each end, on the opposite side of the backing plate Machined as pairs to each pair of cooling holes. The four manifold tubes (104, 106) are sealed in four groups of slots to provide a counter-flow refrigerant path. [Selection] Figure 3 |
| priorityDate | 2005-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.