http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007031596-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
filingDate | 2005-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6557f8f38fef5e970aff414b5b73cd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ebf98b03c2f19f9789074f8ad62f2830 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bba022755b00dd3565ebe341cafffca0 |
publicationDate | 2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007031596-A |
titleOfInvention | Composition for forming silica-based film, silica-based film, method for forming silica-based film, and semiconductor device including silica-based film |
abstract | PROBLEM TO BE SOLVED: To provide a composition for forming a silica-based film that is excellent in low dielectric properties and capable of removing a substituent that should be removed in a shorter heating time than in the past, a silica-based film comprising the composition, and a method for forming the same A semiconductor device provided with such a silica-based coating is provided. A composition for forming a silica-based film according to the present invention includes a siloxane resin having a Si atom to which both a substituent desorbed at a predetermined temperature and a substituent not desorbed at a predetermined temperature are bonded. And a solvent capable of dissolving the siloxane resin. [Selection figure] None |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010135470-A |
priorityDate | 2005-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 853.