http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007031279-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-12 |
| filingDate | 2006-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6557f8f38fef5e970aff414b5b73cd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_012ff7e7830c5b8edab1d44a19712218 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_db40fca061e5d0de74e48225a8b62379 |
| publicationDate | 2007-02-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007031279-A |
| titleOfInvention | Film, coating liquid for forming film, method for producing film, and electronic component having the film |
| abstract | PROBLEM TO BE SOLVED: To provide a film having a low relative dielectric constant capable of being completely cured in a temperature range of 350 to 500 ° C. and having a heating time within 10 minutes and shortening a heat treatment process. SOLUTION: When a film is heat-treated under conditions where the temperature range is 350 to 500 ° C. and the heating time is within 10 minutes, the relative dielectric constant of the film is 3.0 or less. (A) having a siloxane skeleton A film containing a polycondensation reaction product, (b) an organic polymer that decomposes or volatilizes in the temperature range of 250 to 500 ° C., and (c) an organic polymer decomposition accelerator. [Selection figure] None |
| priorityDate | 2006-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 456.