http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007025534-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5f5260a44f98154394a4fa1d69a8ec3c |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03c5b30d0be720cf1c8f50c8ed8c4e81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94348afa32aa10b8b9fa2156c8ce1a88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4cd232db80e93bc752c0e0c73df6e4dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b214bfe4e1d892586d4d4773200050f |
| publicationDate | 2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007025534-A |
| titleOfInvention | Positive type negative type combined novolak chemical amplification resist composition |
| abstract | PROBLEM TO BE SOLVED: To provide a positive and negative type novolak chemically amplified resist composition. The present invention relates to (A) a general formula (I). [Chemical formula 5] Wherein R 1 , R 2 and R 3 are the same or different and each represents substituted or unsubstituted alkyl, substituted or unsubstituted aryl or substituted or unsubstituted aralkyl, or R 1 and R 2 are Together with adjacent carbon atoms may form a cycloalkyl, R 4 , R 5 and R 6 may be the same or different and represent a hydrogen atom, substituted or unsubstituted alkyl, substituted or unsubstituted aryl or A polymer having a structural unit represented by a substituted or unsubstituted aralkyl, n represents an integer of 1 to 3), (B) a compound that generates an acid upon irradiation with radiation, and (C) an organic solvent A positive negative-type novolak-type chemically amplified resist composition is provided. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013050511-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9086623-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008149966-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011197587-A |
| priorityDate | 2005-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 679.