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publicationDate 2007-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-2007021318-A
titleOfInvention Exhaust gas treatment method and treatment apparatus
abstract PROBLEM TO BE SOLVED: To provide an excellent purification ability without causing a sudden heat generation and gas generation in purification of exhaust gas containing an organic phosphorus compound such as tertiary butylphosphine or an organic arsenic compound such as tertiary butylarsine as a harmful component. And a means capable of purifying exhaust gas containing these harmful components efficiently and safely. SOLUTION: An exhaust gas is brought into contact with an inorganic porous body under heating to decompose the harmful components into phosphine and / or arsine and hydrocarbon. Further, the gas containing phosphine and / or arsine and hydrocarbons produced by the decomposition is purified by contacting with a phosphine and / or arsine dry cleaning agent. [Selection] Figure 1
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