| abstract |
A bonding wire and an electrodeposition film can be normally formed on the surface of a structure made of gold even after treatment with oxygen in an activated state. In order to remove carbon-based contaminants (organic matter) remaining on the surfaces of a control electrode and a movable electrode, these oxygen plasmas are irradiated. Next, the substrate 101 treated with oxygen plasma is immersed in a hydrochloric acid solution having a pH of about 4.8, for example, and the hydrochloric acid acts on the surfaces of the control electrode 118 and the movable portion electrode 109. And By this acid treatment, gold oxide formed by irradiating the surfaces of the control electrode 118 and the movable portion electrode 109 made of gold with plasma containing oxygen is removed. [Selection] Figure 1 |