http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007017610-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-08 |
| filingDate | 2005-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_793facea104592951175e7617bceb6f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b4b431fb65071f77377fa9c973f3861 |
| publicationDate | 2007-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007017610-A |
| titleOfInvention | Hydrofluoric acid-resistant protective film and optical element |
| abstract | PROBLEM TO BE SOLVED: To provide a protective film excellent in hydrofluoric acid resistance and capable of maintaining the function of an optical element even under conditions where hydrofluoric acid is generated, and an optical element provided with the protective film. The surface of an optical element is covered with a protective film mainly composed of CeO 2 that is insoluble in hydrofluoric acid. When the optical element is formed by forming a metal film 12 on the surface of the substrate 11, a region wider than the film formation range of the metal film 12 is covered with the protective film 13. As a result, the upper surface and side surfaces of the metal film 12 can be completely coated, and the durability of the optical element against hydrofluoric acid can be further improved. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7050639-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013029324-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019066396-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2022079586-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7094467-B2 |
| priorityDate | 2005-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.