http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007005571-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02cfb0f1aa2718c61bdf184d53adfe79 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate | 2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b68b284a3c7e4a04d1207cebd28d9ef http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1381d778eeb3d52417148e44e62b4fe7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c778a924e5d29b2dc1da0bb5c3b6350e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af0a2dc5e5884804bf4eaa5ca8272e26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b6185d0099914f2f6dc0157b51adf45 |
| publicationDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007005571-A |
| titleOfInvention | Exposure apparatus and device manufacturing method |
| abstract | Deterioration of optical characteristics of an optical system containing a liquid is suppressed and high-precision exposure is realized. A main controller controls current supply to a plurality of Peltier elements in accordance with an irradiation state of illumination light IL, and adjusts (manages) the temperature of at least a part of a liquid Lq2. Even if it changes, the temperature of the liquid Lq2 can be maintained in a desired state. Thereby, it is possible to suppress the deterioration of the optical characteristics of the optical system including the liquid due to the change in the temperature of the liquid Lq2, and it is possible to perform highly accurate exposure. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2015515738-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007235088-A |
| priorityDate | 2005-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.