http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007005028-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246 |
| filingDate | 2005-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8eb0423c882e0be7f0ca48a9635f1a4 |
| publicationDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2007005028-A |
| titleOfInvention | Bi-based dielectric thin film forming composition and Bi-based dielectric thin film |
| abstract | Provided are a Bi-based dielectric thin film forming composition and a Bi-based dielectric thin film, which can obtain a Bi-based dielectric crystallized thin film even by low-temperature firing at less than 800 ° C. A Bi-based dielectric thin film forming composition containing at least a compound obtained by reacting an alkoxide, organic salt or complex of each metal or composite metal of Sr, Bi, Ta and lanthanoid element A. Constitute. By baking the coating film of this composition at a low temperature of less than 800 ° C., the following general formula (1) Sr 1-X AβBi 2 + Y (Ta 2−Z Nb Z ) O 9+ α (1) (In the formula, A represents a lanthanoid element. X, Y and α each independently represents a number of 0 or more and less than 1, Z represents a number of 0 or more and less than 2, and β represents 0.09. A Bi-based dielectric crystallized thin film represented by the following formula is obtained. [Selection figure] None |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020374-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019176195-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011216845-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018056592-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11271085-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105097952-A |
| priorityDate | 2005-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 135.