http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007004072-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
filingDate | 2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ad08812ff90fc207f4f27c5a0bffd60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a98d94247232b53a74e7b71e6ff4459 |
publicationDate | 2007-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-2007004072-A |
titleOfInvention | Radiation sensitive resin composition |
abstract | PROBLEM TO BE SOLVED: To provide a radiation sensitive resin composition with few development defects. An acid-dissociable group-containing resin that is hardly soluble or insoluble in alkali and becomes easily soluble in alkali by the action of an acid contains a repeating unit represented by the following formula (1). [Chemical 1] (R 1 represents a hydrogen atom, a methyl group, an ethyl group, a hydroxyalkyl group having 1 to 4 carbon atoms, or a perfluoroalkyl group having 1 to 4 carbon atoms, A represents a single bond or a divalent organic group, R 2 is independently a hydrogen atom, a substituted or unsubstituted alkyl group having 1 to 20 carbon atoms, a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or R 2 is bonded to each other. A cyclic group having 4 to 20 atoms or a derivative thereof including atoms to which each is bonded. [Selection] Figure 1 |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012074025-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103250100-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020246326-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107390472-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012177807-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012118356-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107390472-B |
priorityDate | 2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 347.