http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006528560-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0307 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0054 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L- http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate | 2004-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006528560-A |
| titleOfInvention | Anchor for micro electro mechanical system having SOI substrate and method for manufacturing the same |
| abstract | PROBLEM TO BE SOLVED: To provide a MEMS device (12) including a mechanical structure (20a, 20b, 20c) and an anchor (30a, 30b, 30c) for fixing the mechanical structure (20a, 20b, 20c) to a substrate (14), and It relates to the manufacturing technology. The anchor (30a, 30b, 30c) of the present invention is formed of a material that is relatively insensitive to the release process of the mechanical structure (20a, 20b, 20c). In this regard, the etch release process is selective or preferential to the material that secures the mechanical structure (20a, 20b, 20c) with respect to the material comprising the anchor (30a, 30b, 30c). Furthermore, the anchors (30a, 30b, 30c) of the present invention have the substrate (14) so that the removal of the insulating layer has little or no effect on the fixing of the mechanical structure (20a, 20b, 20c) to the substrate (14). Fixed to. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2021525357-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7254090-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013540264-A |
| priorityDate | 2003-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 50.