| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24578
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-30455 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-00 |
| filingDate |
2004-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006523932-A |
| titleOfInvention |
Ion beam incident angle detector for ion implantation system |
| abstract |
An ion beam incident angle detector for an ion implantation system is provided. The present invention facilitates semiconductor device manufacturing by monitoring and correcting angular errors via incident ion beam angle detectors 302, 304, 306 during an ion implantation process. Furthermore, the present invention facilitates semiconductor device fabrication by calibrating the process disk 300 with respect to the incident ion beam without measuring the implantation results on the wafer 310 prior to the ion implantation process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102273167-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200047806-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011134591-A |
| priorityDate |
2003-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |