| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2891
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-0458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-04 |
| filingDate |
2003-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2006-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006519359-A |
| titleOfInvention |
Apparatus and method for cooling an optically inspected integrated circuit |
| abstract |
A cooling plate and microspray cooling system combination is disclosed that is convenient for use in testing electronically activated integrated circuits. The system includes a transparent heat spreader and a microspray head disposed in the vicinity of the heat spreader. The spray head sprays cooling fluid around the thermal diffuser to remove heat from the chip. Alternatively, the micro spray head is provided inside the cooling plate and sprays the cooling liquid inside the holder so that the holder is cooled. The holder is in physical contact with the heat spreader so that the holder is cooled by spraying and heat is removed from the heat spreader and from the chip. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8553322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7227193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020137083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020106361-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020190561-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023176044-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010113355-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023176043-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009168565-A |
| priorityDate |
2003-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |