http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006513455-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0758 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate | 2003-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006513455-A |
| titleOfInvention | Silicon-containing resist composition and method of forming patterned material on a substrate (low silicon outgassing resist for two-layer lithography) |
| abstract | A silicon-containing resist formulation that reduces or eliminates silicon outgassing is provided. A silicon-containing resist composition having low silicon outgassing and high resolution lithographic performance, particularly in two-layer or multi-layer lithography applications using imaging radiation with a wavelength of 193 nm or less, contained silicon. This is made possible by the presence of an imaging polymer having pendant groups that are not acid labile. Preferably, the resist composition of the present invention is further characterized in that it contains silicon and is substantially free of acid-labile moieties. |
| priorityDate | 2002-09-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.