http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006512600-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006512600-A |
| titleOfInvention | Highly sensitive resist composition for electron-based lithography |
| abstract | PROBLEM TO BE SOLVED: To provide a resist composition having an acid-sensitive imaging polymer and a radiation-sensitive acid generator component. The present resist composition comprises: (I) a first radiation sensitive acid generator selected from the group consisting of dissolution inhibiting acid generators; (Ii) a second radiation sensitive acid generator selected from the group consisting of an unprotected acidic group-functionalized acid generator and an acid labile group protected acidic group-functionalized radiation sensitive acid generator When, And enables the formation of highly sensitive resists suitable for use in EPL, EUV, soft x-ray and other low energy intensity lithographic imaging applications. The resist composition is also useful for other lithography methods. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771923-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-5267126-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8361691-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008029673-A1 |
| priorityDate | 2002-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 58.