Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C311-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C25-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G59-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 |
filingDate |
2003-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
2006-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
JP-2006504785-A |
titleOfInvention |
Ion photoacid generator having segmented hydrocarbon-fluorinated hydrocarbon sulfonate anions |
abstract |
A photoacid generator salt comprising a photoactive cation moiety and a segmented highly fluorinated hydrocarbon anion moiety is disclosed, wherein the photoacid generator salt provides high photoacid strength and adjusts for solubility and polarity It is possible. The invention further relates to photoacid generators such as those used in photoinitiated acid catalyzed processes for applications such as photoresists and photopolymerization for microlithographic printing. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7101658-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019518126-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011121938-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010094028-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010094029-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015125554-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8227169-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007145797-A |
priorityDate |
2002-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |