http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006349550-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2005-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df25cf7579b2fcb9b05b78afa727498d |
| publicationDate | 2006-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2006349550-A |
| titleOfInvention | Semiconductor measuring equipment |
| abstract | PROBLEM TO BE SOLVED: To improve measurement accuracy of a measuring apparatus using a mercury probe. A vacuum evacuation groove 2, a vacuum measurement groove 3, and electrode grooves 4, 5 are provided on the surface of a stage 1 in this order from the outside. A vacuum pump is connected to the evacuation groove 2, a vacuum gauge 23 is connected to the vacuum measurement groove 3, and pipes 4 a and 5 a that can supply mercury are connected to the electrode grooves 4 and 5, respectively. By adopting such a configuration, it is possible to match the degree of vacuum measured by the vacuum gauge 23 with the effective degree of vacuum inside the electrode grooves 4 and 5 when evacuating with a vacuum pump. it can. Thereby, the effective degree of vacuum can be accurately controlled, and the area of the electrode formed on the wafer 31 can be made constant. Therefore, measurement accuracy can be improved. [Selection] Figure 1 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014027193-A |
| priorityDate | 2005-06-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556032 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23931 |
Total number of triples: 14.