| abstract |
An electrostatic chuck that suppresses leakage of heat transfer gas supplied to a substrate mounting surface on the surface of a substrate through a joint portion between the substrate and a cooling member to the outside of the electrostatic chuck in a high temperature environment. provide. In an electrostatic chuck, an electrode for generating an electrostatic attraction force is embedded, a base made of ceramics, a cooling member containing metal, and a bonding material for bonding the base and the cooling member. A gas supply path 9 that passes through the base body 3, the bonding material 7, and the cooling member 5, and a locking member 11 and a bolt member 13 that are fixing members that mechanically fix the base body 3 and the cooling member 5. Prepare. [Selection] Figure 1 |