| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2005-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_824072a2cd2e301d720dc1bad9835989
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_938c6744e65655a6549bab9b545cbacc |
| publicationDate |
2006-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-2006343400-A |
| titleOfInvention |
Photosensitive resin film and method for producing photoresist pattern using the same |
| abstract |
PROBLEM TO BE SOLVED: To provide a photosensitive resin film capable of reducing sludge during development and a method for producing a resist pattern using the same. A photosensitive resin film obtained by sequentially laminating a layer containing a curable resin component and a photocatalytic coating layer. The photocatalytic coating preferably contains anatase type crystalline titania. Further, the photocatalytic coating layer is a film formed by applying and drying a titania film forming liquid obtained by mixing an anatase crystal / amorphous mixed titania sol solution containing amorphous titania and anatase crystal titania or a precursor thereof and an organic substance. Is preferable. [Selection figure] None |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102582910-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101970510-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102412748-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180062564-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7348177-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170007755-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020004396-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018101740-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20220093006-A |
| priorityDate |
2005-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |